Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671686 | Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefrom | Jin Sun Karoline Choi, In-Kyun Shin, Sang-Hee Lee | 2017-06-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671686 | Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefrom | Jin Sun Karoline Choi, In-Kyun Shin, Sang-Hee Lee | 2017-06-06 |