Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9751189 | Compliant polishing pad and polishing module | Chih-Hung Chen, Steven M. Zuniga | 2017-09-05 |
| 9662762 | Modifying substrate thickness profiles | Hung Chih Chen | 2017-05-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9751189 | Compliant polishing pad and polishing module | Chih-Hung Chen, Steven M. Zuniga | 2017-09-05 |
| 9662762 | Modifying substrate thickness profiles | Hung Chih Chen | 2017-05-30 |