Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793131 | Pattern forming method using resist underlayer film | Tomoya Ohashi, Shigeo Kimura, Yuki Usui | 2017-10-17 |
| 9678427 | Resist underlayer film-forming composition containing copolymer that has triazine ring and sulfur atom in main chain | Takahiro Kishioka, Yoshiomi Hiroi, Tomoya Ohashi, Yuki Usui | 2017-06-13 |
| 9534140 | Resist underlayer film-forming composition | Tomoya Ohashi, Shigeo Kimura | 2017-01-03 |