Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9822330 | Light-degradable material, substrate, and method for patterning the substrate | Shigeo Kimura, Yoshiomi Hiroi, Yuki Usui, Hiromi Kitano, Tadashi Nakaji +1 more | 2017-11-21 |
| 9678427 | Resist underlayer film-forming composition containing copolymer that has triazine ring and sulfur atom in main chain | Hiroto OGATA, Yoshiomi Hiroi, Tomoya Ohashi, Yuki Usui | 2017-06-13 |