Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9646374 | Line width error obtaining method, line width error obtaining apparatus, and inspection system | Hideki Nukada, Kazuhiko Inoue | 2017-05-09 |
| 9575010 | Inspection apparatus and inspection method | Riki Ogawa, Nobutaka Kikuiri | 2017-02-21 |