Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852916 | Single platform, multiple cycle spacer deposition and etch | Chentsau Ying, Srinivas D. Nemani, Ellie Yieh | 2017-12-26 |
| 9653253 | Plasma-based material modification using a plasma source with magnetic confinement | William F. DiVergilio, Stephen E. Savas, Susan Felch, Tienyu Sheng | 2017-05-16 |