Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852887 | Ion source of an ion implanter | Xiao Bai, Zhimin Wan, Peter M. Kopalidis | 2017-12-26 |
| 9831466 | Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier | Allan B. Wiesnoski, Carl Galewski | 2017-11-28 |
| 9721759 | System and method for distributing RF power to a plasma source | Richard K. Karlquist, Robert Eugene Weisse | 2017-08-01 |
| 9653253 | Plasma-based material modification using a plasma source with magnetic confinement | William F. DiVergilio, Susan Felch, Tienyu Sheng, Hao Chen | 2017-05-16 |