Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852887 | Ion source of an ion implanter | Stephen E. Savas, Zhimin Wan, Peter M. Kopalidis | 2017-12-26 |
| 9748072 | Lower dose rate ion implantation using a wider ion beam | Zhimin Wan, Rekha Padmanabhan, Gary N. Cai, Ching-I Li, Ger-Pin Lin +4 more | 2017-08-29 |