Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9595470 | Methods of preparing tungsten and tungsten nitride thin films using tungsten chloride precursor | Raashina Humayun, Juwen Gao, Michal Danek, Joshua Collins | 2017-03-14 |
| 9589808 | Method for depositing extremely low resistivity tungsten | Raashina Humayun, Deqi Wang, Yan Guan | 2017-03-07 |