Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9574992 | Single wavelength ellipsometry with improved spot size capability | Fuming Wang, Kevin Peterlinz, Hidong Kwak, Damon F. Kvamme, Uri Greenberg +1 more | 2017-02-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9574992 | Single wavelength ellipsometry with improved spot size capability | Fuming Wang, Kevin Peterlinz, Hidong Kwak, Damon F. Kvamme, Uri Greenberg +1 more | 2017-02-21 |