Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798241 | Methods of manufacturing photomasks, methods of forming photoresist patterns and methods of manufacturing semiconductor devices | Sang Hyun Kim, Byoung-Hun Park, Byung-Gook Kim, Chan-uk Jeon | 2017-10-24 |
| 9748438 | Nanostructure semiconductor light emitting device | Jung Sub Kim, Yeon Woo Seo, Byung Kyu Chung, Dae Myung Chun, Soo Jeong CHOI | 2017-08-29 |
| 9658522 | Reflective extreme ultraviolet mask | Sang Hyun Kim, Dong-Wan Kim, Chang-Min Park, In-Sung Kim | 2017-05-23 |
| 9588413 | Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit device | Sang Hyun Kim, Seong-sue Kim | 2017-03-07 |