Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798238 | Cross technology reticle (CTR) or multi-layer reticle (MLR) CDU, registration, and overlay techniques | Guo Xiang Ning, Paul Ackmann, Soon Yoeng Tan | 2017-10-24 |
| 9798244 | Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity | Philipp Jaschinsky, Remi Riviere, Wolfram Grundke | 2017-10-24 |
| 9653367 | Methods including a processing of wafers and spin coating tool | Torsten Maehr, Martin Freitag | 2017-05-16 |