Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798244 | Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity | Arthur Hotzel, Remi Riviere, Wolfram Grundke | 2017-10-24 |