Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847221 | Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing | Kevin McLaughlin, Kapu Sirish Reddy | 2017-12-19 |
| 9601319 | Systems and methods for eliminating flourine residue in a substrate processing chamber using a plasma-based process | Andrew Stratton Bravo, Joydeep Guha | 2017-03-21 |