Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847221 | Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing | Amit Pharkya, Kapu Sirish Reddy | 2017-12-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847221 | Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing | Amit Pharkya, Kapu Sirish Reddy | 2017-12-19 |