Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601319 | Systems and methods for eliminating flourine residue in a substrate processing chamber using a plasma-based process | Joydeep Guha, Amit Pharkya | 2017-03-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601319 | Systems and methods for eliminating flourine residue in a substrate processing chamber using a plasma-based process | Joydeep Guha, Amit Pharkya | 2017-03-21 |