Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735034 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Stephen Moffatt, Leonid M. Tertitski, Norman L. Tam +2 more | 2017-08-15 |
| D794753 | Showerhead for a semiconductor processing chamber | — | 2017-08-15 |
| D790039 | Showerhead for a semiconductor processing chamber | Lara Hawrylchak, Kong CHAN | 2017-06-20 |