Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799487 | Bi-directional double-pass multi-beam writing | — | 2017-10-24 |
| 9653263 | Multi-beam writing of pattern areas of relaxed critical dimension | Klaus Schiessl | 2017-05-16 |
| 9568907 | Correction of short-range dislocations in a multi-beam writer | Christoph Spengler, Markus Wagner, Samuel Kvasnica | 2017-02-14 |