Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653263 | Multi-beam writing of pattern areas of relaxed critical dimension | Elmar Platzgummer | 2017-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653263 | Multi-beam writing of pattern areas of relaxed critical dimension | Elmar Platzgummer | 2017-05-16 |