Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9568907 | Correction of short-range dislocations in a multi-beam writer | Elmar Platzgummer, Christoph Spengler, Markus Wagner | 2017-02-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9568907 | Correction of short-range dislocations in a multi-beam writer | Elmar Platzgummer, Christoph Spengler, Markus Wagner | 2017-02-14 |