Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726969 | Reflective mask blank, method of manufacturing same, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tatsuo Asakawa | 2017-08-08 |
| 9720315 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tatsuo Asakawa | 2017-08-01 |
| 9581895 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Toshihiko Orihara, Junichi Horikawa | 2017-02-28 |
| 9535318 | Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Kazuhiro Hamamoto, Tatsuo Asakawa, Osamu Maruyama | 2017-01-03 |