Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798050 | Substrate with multilayer reflective film, mask blank, transfer mask and method of manufacturing semiconductor device | Toshihiko Orihara | 2017-10-24 |
| 9746762 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Yoichi Usui | 2017-08-29 |
| 9726969 | Reflective mask blank, method of manufacturing same, reflective mask and method of manufacturing semiconductor device | Tatsuo Asakawa, Tsutomu Shoki | 2017-08-08 |
| 9720315 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tatsuo Asakawa, Tsutomu Shoki | 2017-08-01 |
| 9581895 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Toshihiko Orihara, Tsutomu Shoki, Junichi Horikawa | 2017-02-28 |
| 9535318 | Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Tatsuo Asakawa, Osamu Maruyama, Tsutomu Shoki | 2017-01-03 |