Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726969 | Reflective mask blank, method of manufacturing same, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki | 2017-08-08 |
| 9720315 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki | 2017-08-01 |
| 9535318 | Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Kazuhiro Hamamoto, Osamu Maruyama, Tsutomu Shoki | 2017-01-03 |