Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9617636 | System and method for controlling wafer and thin film surface temperature | Bu-Chin Chung | 2017-04-11 |
| 9551569 | Apparatus and method for curvature and thin film stress measurement | Robert J. Champetier, Chung-Hua Fu, Bu-Chin Chung | 2017-01-24 |