Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9617636 | System and method for controlling wafer and thin film surface temperature | Chung-Yuan Wu | 2017-04-11 |
| 9613875 | Method and system for manufacturing semiconductor epitaxy structure | Takashi Kobayashi, Po-Jung Lin, Che-Lin Chen | 2017-04-04 |
| 9551569 | Apparatus and method for curvature and thin film stress measurement | Chung-Yuan Wu, Robert J. Champetier, Chung-Hua Fu | 2017-01-24 |