Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558953 | Etching method, and method of producing semiconductor substrate product and semiconductor device using the same | Naotsugu Muro, Tetsuya KAMIMURA, Takahiro Watanabe, Kee Young Park | 2017-01-31 |
| 9548217 | Etching method of semiconductor substrate, and method of producing semiconductor device | Naotsugu Muro, Tetsuya KAMIMURA, Atsushi Mizutani | 2017-01-17 |