Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9688912 | Etching method, and etching liquid to be used therein and method of producing a semiconductor substrate product using the same | — | 2017-06-27 |
| 9558953 | Etching method, and method of producing semiconductor substrate product and semiconductor device using the same | Naotsugu Muro, Tadashi Inaba, Takahiro Watanabe, Kee Young Park | 2017-01-31 |
| 9548217 | Etching method of semiconductor substrate, and method of producing semiconductor device | Naotsugu Muro, Tadashi Inaba, Atsushi Mizutani | 2017-01-17 |