Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9809746 | Etching liquid, kit of same, etching method using same, method for producing semiconductor substrate product, and method for manufacturing semiconductor element | Yasuo Sugishima, Keeyoung Park | 2017-11-07 |
| 9726978 | Cleaning composition, cleaning process, and process for producing semiconductor device | Tomonori Takahashi, Kazutaka Takahashi, Hiroyuki Seki, Hideo Fushimi, Tomoo Kato | 2017-08-08 |
| 9588428 | Resist removing liquid, resist removal method using same and method for producing photomask | — | 2017-03-07 |
| 9548217 | Etching method of semiconductor substrate, and method of producing semiconductor device | Naotsugu Muro, Tetsuya KAMIMURA, Tadashi Inaba | 2017-01-17 |