Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829800 | System correction from long timescales | Boris Bittner, Norbert Wabra, Martin von Hodenberg, Sonja Schneider, Ruediger Mack | 2017-11-28 |
| 9709770 | Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatus | Boris Bittner, Norbert Wabra, Sonja Schneider, Hendrik Wagner, Rumen Iliew +1 more | 2017-07-18 |