Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785058 | Method for ascertaining distortion properties of an optical system in a measurement system for microlithography | Susanne Toepfer, Michael Himmelhaus | 2017-10-10 |
| 9786046 | Method and device for determining a lateral offset of a pattern on a substrate relative to a desired position | Michael Arnz | 2017-10-10 |