Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785058 | Method for ascertaining distortion properties of an optical system in a measurement system for microlithography | Dirk Seidel, Michael Himmelhaus | 2017-10-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785058 | Method for ascertaining distortion properties of an optical system in a measurement system for microlithography | Dirk Seidel, Michael Himmelhaus | 2017-10-10 |