Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9797805 | Test object for measuring the point spread function of an optical system | Lars Stoppe, Robert Pomraenke | 2017-10-24 |
| 9786046 | Method and device for determining a lateral offset of a pattern on a substrate relative to a desired position | Dirk Seidel | 2017-10-10 |