Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9767993 | Plasma processing apparatus | Kiyotaka Ishibashi | 2017-09-19 |
| 9690879 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe | Hiroyuki Mitsui, Susumu NISHIURA, Hiroshi Ekko, Kaori Inoshima, Kazuo NAKAYA | 2017-06-27 |
| 9616665 | Method for manufacturing liquid supply member and method for manufacturing liquid discharge head | — | 2017-04-11 |
| 9595425 | Antenna, dielectric window, plasma processing apparatus and plasma processing method | Naoki Matsumoto, Wataru Yoshikawa, Jun Yoshikawa, Kazuki Moyama, Kiyotaka Ishibashi +1 more | 2017-03-14 |