Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9595425 | Antenna, dielectric window, plasma processing apparatus and plasma processing method | Naoki Matsumoto, Wataru Yoshikawa, Jun Yoshikawa, Kiyotaka Ishibashi, Osamu Morita +1 more | 2017-03-14 |