Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690879 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe | Hiroyuki Mitsui, Susumu NISHIURA, Hiroshi Ekko, Kaori Inoshima, Osamu Morita | 2017-06-27 |