Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748072 | Lower dose rate ion implantation using a wider ion beam | Zhimin Wan, Rekha Padmanabhan, Xiao Bai, Gary N. Cai, Ching-I Li +4 more | 2017-08-29 |
| 9697988 | Ion implantation system and process | Zhimin Wan, Nicholas R. White | 2017-07-04 |