Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824850 | Deceleration apparatus for ribbon and spot beams | Zhimin Wan, Erik Collart | 2017-11-21 |
| 9711318 | Ribbon beam ion source of arbitrary length | — | 2017-07-18 |
| 9697988 | Ion implantation system and process | Zhimin Wan, Kourosh Saadatmand | 2017-07-04 |