| 9779186 |
Methods for performing model-based lithography guided layout design |
Yu Cao, Hanying Feng |
2017-10-03 |
| 9746784 |
Lens heating compensation systems and methods |
Peng Liu, Yu Cao |
2017-08-29 |
| 9720561 |
Progress bar with graphical effects to indicate download progress and connection state |
Jing Zhang, Meina Li, Yang Li, Danzhi Chen, Nian Liu +3 more |
2017-08-01 |
| 9672301 |
Pattern selection for lithographic model calibration |
Yu Cao, Wenjin Shao, Ronaldus Johannes Gijsbertus Goossens |
2017-06-06 |
| 9645509 |
Scanner model representation with transmission cross coefficients |
Yu Cao, James Patrick Koonmen, Stefan Hunsche |
2017-05-09 |
| 9619603 |
Optimization of source, mask and projection optics |
Hanying Feng, Yu Cao |
2017-04-11 |
| 9588439 |
Information matrix creation and calibration test pattern selection based on computational lithography model parameters |
Antoine Jean Bruguier, Yu Cao, Wenjin Shao |
2017-03-07 |