Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779186 | Methods for performing model-based lithography guided layout design | Jun Ye, Yu Cao | 2017-10-03 |
| 9619603 | Optimization of source, mask and projection optics | Yu Cao, Jun Ye | 2017-04-11 |
| 9588438 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Luoqi Chen, Rafael C. Howell, Xinjian Zhou, Yi-Fan Chen | 2017-03-07 |