Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588438 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Hanying Feng, Rafael C. Howell, Xinjian Zhou, Yi-Fan Chen | 2017-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588438 | Optimization flows of source, mask and projection optics | Duan-Fu Stephen Hsu, Hanying Feng, Rafael C. Howell, Xinjian Zhou, Yi-Fan Chen | 2017-03-07 |