Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9672301 | Pattern selection for lithographic model calibration | Yu Cao, Jun Ye, Ronaldus Johannes Gijsbertus Goossens | 2017-06-06 |
| 9588439 | Information matrix creation and calibration test pattern selection based on computational lithography model parameters | Antoine Jean Bruguier, Yu Cao, Jun Ye | 2017-03-07 |