Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753372 | Radiation source for an EUV optical lithographic apparatus, and lithographic apparatus comprising such a radiation source | — | 2017-09-05 |
| 9753383 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more | 2017-09-05 |