Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816203 | Crystalline strontium titanate and methods of forming the same | — | 2017-11-14 |
| 9790594 | Combination CVD/ALD method, source and pulse profile modification | Hannu Huotari | 2017-10-17 |
| 9704716 | Deposition of smooth metal nitride films | Jaakko Anttila | 2017-07-11 |
| 9634106 | Doped metal germanide and methods for making the same | Viljami Pore, Suvi Haukka, Eva Tois | 2017-04-25 |
| 9583348 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2017-02-28 |