Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9631272 | Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds | Steven Marcus, Suvi Haukka, Wei Li | 2017-04-25 |
| 9583348 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2017-02-28 |