Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9631272 | Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds | Dong Li, Suvi Haukka, Wei Li | 2017-04-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9631272 | Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds | Dong Li, Suvi Haukka, Wei Li | 2017-04-25 |