Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850575 | ALD of metal-containing films using cyclopentadienly compounds | Sean T. Barry, Yamile A.M. Wasslen | 2017-12-26 |
| 9831094 | Enhanced thin film deposition | Eva Tois, Kai-Erik Elers, Wei Li | 2017-11-28 |
| 9677175 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2017-06-13 |
| 9670582 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2017-06-06 |
| 9587307 | Enhanced deposition of noble metals | Suvi Haukka, Marko Tuominen | 2017-03-07 |