Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850575 | ALD of metal-containing films using cyclopentadienly compounds | Yamile A.M. Wasslen, Antti Rahtu | 2017-12-26 |
| 9677175 | ALD of metal-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2017-06-13 |
| 9670582 | ALD of metal-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2017-06-06 |