Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9827578 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, John M. White, Suhail Anwar, Gaku Furuta | 2017-11-28 |
| 9822449 | Showerhead support structures | Allen Lau | 2017-11-21 |
| 9758869 | Anodized showerhead | Soo Young Choi, Suhail Anwar, Gaku Furuta, Beom Soo Park, John M. White +1 more | 2017-09-12 |
| 9677177 | Substrate support with quadrants | Soo Young Choi, Beom Soo Park, Shinichi Kurita, Bora Oh, Gaku Furuta | 2017-06-13 |
| D784276 | Susceptor assembly | Shinichi Kurita | 2017-04-18 |
| 9580804 | Diffuser support | John M. White, Yeh Kurt Chang | 2017-02-28 |