Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9827578 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, John M. White, Robin L. Tiner, Suhail Anwar | 2017-11-28 |
| 9758869 | Anodized showerhead | Soo Young Choi, Suhail Anwar, Beom Soo Park, Robin L. Tiner, John M. White +1 more | 2017-09-12 |
| 9677177 | Substrate support with quadrants | Robin L. Tiner, Soo Young Choi, Beom Soo Park, Shinichi Kurita, Bora Oh | 2017-06-13 |