Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9827578 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, Robin L. Tiner, Suhail Anwar, Gaku Furuta | 2017-11-28 |
| 9818580 | Transmission line RF applicator for plasma chamber | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, Ranjit Indrajit Shinde +2 more | 2017-11-14 |
| 9758869 | Anodized showerhead | Soo Young Choi, Suhail Anwar, Gaku Furuta, Beom Soo Park, Robin L. Tiner +1 more | 2017-09-12 |
| 9761365 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Jozef Kudela, Carl A. Sorensen | 2017-09-12 |
| 9590113 | Multilayer passivation or etch stop TFT | Dong-Kil Yim, Tae Kyung Won, Seon-Mee Cho | 2017-03-07 |
| 9580804 | Diffuser support | Robin L. Tiner, Yeh Kurt Chang | 2017-02-28 |